Name: Integrated Dry Vacuum Pump, Gas Abatement Systems
Availability: InStock

Integrated Dry Vacuum Pump, Gas Abatement Systems

Integrated Dry Vacuum Pump, Gas Abatement Systems

Category: Gas Abatement Systems

Quantity:

Model FDS

Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs

Flexible configuration
Reduced installation burden
Space-saving
Batch operation and management possible
Connect 1-8 pumps

Features and Benefits

Integrated dry vacuum pump/exhaust abatement systems. We will propose a system that will maximize production efficiency for our customers. Incorporating dry vacuum pumps into an exhaust abatement system with the ideal configuration for the requirements will reduce the burden of equipment installation. Batch operation and management is possible as an integrated exhaust system, achieving highly efficient processes.

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