Name: Model G5
Availability: InStock

Model G5

Category: Gas Abatement Systems

Quantity:

EBARA Semiconductor Manufacturing Equipment

EBARA Exhaust Abatement System

EBARA Combustion-Type Exhaust Abatement System

Model G6

Model FDS

Combustion-type exhaust abatement system that offers highly efficient treatment of flammable gases and perfluorocarbons (PFCs)

Combustion-type exhaust abatement systems
Batch treatment of multiple gas types
Highly efficient abatement of PFCs
Byproduct removal measures/automatic removal of powdery byproducts
Low running cost
High up-time
On-demand operation to suit gas type and volume
Greater ease of maintenance
CE marking/SEMI-S2/NRTL available

Features and Benefits

The Model G5 range is a combustion-type exhaust abatement system that offers highly efficient abatement of many different gases used in manufacturing operations. Capable of batch treatment of multiple types of gases and of highly efficient treatment of PFCs, which are usually difficult to abate. With unique measures to remove byproducts and on-demand operation with variable fuel volume to suit the type and volume of gas being abated, Model G5 achieves reductions in running costs. Ideal for applications in the manufacturing operations of electric components such as semiconductors, LCD panels, solar cells, and LEDs, chemicals and materials manufacture, and research laboratories. Range includes large capacity models with flow rates of 1,200 L/min.

Specifications

Model	Unit	G5-350 A1~A4/P1~P4	G5-500 A1~A4/P1~P4	G5-600 A1~A4/P1~P4	G5-1200 A1~A4/P1~P4
Abatement method		burn+ wet	burn+ wet	burn+ wet	burn+ wet
Max. inflow gas volume	L/min	350	500	600	1200
Fuel		City gas or propane gas	City gas or propane gas	City gas or propane gas	City gas or propane gas
Dimensions	W x D x H mm	1,200 x 650 x 1,900	1,200 x 650 x 1,900	1,200 x 1,100 x 2,000	1,200 x 1,100 x 2,200
Gases (e.g.)		Process (depo) gases Cleaning gases, including SiH4, PH3, GeH4, NH3, SiH2Cl2, TEOS, B2H6, H2 NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. PFCs CF4, C2F6, C3F8, CHF3, SF6, etc.	Process (depo) gases Cleaning gases, including SiH4, PH3, GeH4, NH3, SiH2Cl2, TEOS, B2H6, H2 NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. PFCs CF4, C2F6, C3F8, CHF3, SF6, etc.	Process (depo) gases SiH4, PH3, GeH4, NH3, SiH2Cl2, TEOS, B2H6, H2 Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. PFCs CF4, C2F6, C3F8, CHF3, SF6, etc.	Process (depo) gases SiH4, PH3, GeH4, NH3, SiH2Cl2, TEOS, B2H6, H2 Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. PFCs CF4, C2F6, C3F8, CHF3, SF6, etc.
Standard equipment		Burner scraper for powder removal	Burner scraper for powder removal	Burner scraper for powder removal	Burner scraper for powder removal
Options		City water/drainage consumption reduction unit	City water/drainage consumption reduction unit	City water/drainage consumption reduction unit	City water/drainage consumption reduction unit