Highly efficient, energy-saving catalysis-type exhaust abatement system
- Catalysis-type exhaust abatement system
- Low power consumption
- Highly efficient abatement of PFC gases
- No fuel required
- Low maintenance costs
Features and Benefits
Model GCR is a catalysis-type exhaust abatement system that efficiently decomposes and removes gases, including PFC gases such as CF4 used for etching oxide semiconductor films, at low running costs.
Specifications
| Model |
Unit |
GCR120* |
GCR250 |
| Abatement method |
catalytic + wet |
catalytic + wet |
| Max. inflow gas volume |
L/min |
120 |
250 |
| Reactor life detector |
PFC detector |
PFC detector |
| Dimensions |
W x D x H mm |
1,200×600×1,800mm |
1,400×700×1,850mm |
| Gases |
CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. |
CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. |
| *Discontinued products |
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