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Model GCR

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Highly efficient, energy-saving catalysis-type exhaust abatement system
  • Catalysis-type exhaust abatement system
  • Low power consumption
  • Highly efficient abatement of PFC gases
  • No fuel required
  • Low maintenance costs

Features and Benefits

Model GCR is a catalysis-type exhaust abatement system that efficiently decomposes and removes gases, including PFC gases such as CF4 used for etching oxide semiconductor films, at low running costs.


Specifications

 
Model Unit GCR120* GCR250
Abatement method catalytic + wet catalytic + wet
Max. inflow gas volume L/min 120 250
Reactor life detector PFC detector PFC detector
Dimensions W x D x H mm 1,200×600×1,800mm 1,400×700×1,850mm
Gases CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc.
*Discontinued products

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