Dry abatement system for treatment of hazardous substances such as arsenic and phosphorous without need for water scrubbing
- Best suited for research facilities
- Adsorbs specific chemical substances
Features and Benefits
The most suitable adsorbent can be selected for each target process gas, making it suitable for a wide range of applications.
Specifications
| Model |
Unit |
GTE-3-0 |
GTE-0-2 |
GTC-1-0 |
GTC-2-0 |
GTC-6-0 |
GTC-0-1 |
| Abatement method |
Dry |
Dry |
Dry |
Dry |
Dry |
Dry |
| Gases |
HBr, Cl2, BCl3, F2, SiF4, HF, COF2, C5F8, C4F6, etc. |
NF3, N2O, NO, NO2, SiF4, HF, F2, etc. |
SiH4, PH3, AsH3, TMS, etc. |
NH3, SiH2Cl2, SiCl4, etc. |
TEOS, TMB, TME, O3, etc. |
ClF3, HF, F2, HCl, etc. |
| Max. inflow gas volume |
L/min |
100 |
80 |
100 |
100 |
100 |
100 |
| Dimension Single |
W x D x H mm |
600x600x2,000 |
900x600x2,000 |
600x600x2,000 |
600x600x2,000 |
600x600x2,000 |
600x600x2,000 |
| Dual |
W x D x H mm |
900x600x2,000 |
- |
900x600x2,000 |
900x600x2,000 |
900x600x2,000 |
900x600x2,000 |
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