Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.
- For fast pumping in large-volume vacuum chambers
- Optional exhaust configurations for organic solvent applications
- Hydrogen and other light gas pumping
- Corrosion resistant material options
- Oil-free
- CE marking/SEMI-S2/NRTL available
- Catalog
Features and Benefits
The Model ESA product lineup includes models with pumping speeds ranging from 1,400 to 10,000 L/min, suited for pumping light gases such as hydrogen, and models with exhaust speeds from 20,000 to 80,000 L/min, for fast pumping in large volume chambers. The light-gas application models with pumping speeds of 10,000 L/min and below offer a small footprint and enhanced corrosion resistance options, which are ideal for large-volume light-gas pumping applications such as MO-CVD. The larger models achieve quiet, low-vibration operation, with optional exhaust configurations for organic solvent applications. They are ideal for LCD spatter devices, vacuum drying processes, and large load-lock applications.
Specifications
| Model |
Unit |
ESA15-D |
ESA25-D |
ESA25XW |
ESA70W(-D) |
ESA70WN(-D) |
ESA80W-HDF |
ESA80WN-HDF |
ESA100W |
ESA100WN |
ESA200W |
ESA300W |
ESA500W |
ESA700W |
| Pumping Speed |
L/min |
1,400 (50Hz) |
2,500 (50Hz) |
5,000 (50Hz) |
7,000 (50Hz) |
7,000 (50Hz) |
8,400 (50Hz/60Hz) |
8,400 (50Hz/60Hz) |
10,000 (50Hz/60Hz) |
10,000 (50Hz/60Hz) |
20,000 (50Hz/60Hz) |
28,000 (50Hz) |
47,000 (50Hz) |
80,000 (50Hz/60Hz) |
| 1,700 (60Hz) |
3,000 (60Hz) |
6,000 (60Hz) |
8,400 (60Hz) |
8,400 (60Hz) |
30,000 (60Hz) |
50,000 (60Hz) |
| Ultimate Pressure |
Pa |
400 (50Hz) |
5.3 (50Hz) |
5.3 (50Hz) |
0.27 (50Hz) |
0.4 (50Hz) |
0.13 |
0.27 |
0.13 |
0.27 |
0.53 |
0.53 |
0.53 |
0.5 |
| 270 (60Hz) |
4.0 (60Hz) |
4.0 (60Hz) |
0.13 (60Hz) |
0.27 (60Hz) |
| Connection |
Inlet |
|
NW40 |
NW50 |
ISO80 |
NW50 |
NW50 |
NW50 |
NW50 |
NW50 |
NW50 |
NW80 |
ISO100 |
ISO160 |
ISO160 |
| Outlet |
|
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
NW50 |
| Approx. Power at Ultimate Pressure |
kW |
2.9 (50Hz) |
2.6 (50Hz) |
5.2 (50Hz) |
3.6 (50Hz) |
3.6 (50Hz) |
4.2 |
4.2 |
4.9 |
4.9 |
3.2 (50Hz) |
6.6 (50Hz) |
5.1 (50Hz) |
7.4 |
| 3.2 (60Hz) |
2.9 (60Hz) |
5.8 (60Hz) |
4.0 (60Hz) |
4.0 (60Hz) |
3.4 (60Hz) |
7.3 (60Hz) |
6.7 (60Hz) |
| Cooling water |
Flow rate |
L/min |
3.5~8 |
3.5~8 |
7~16 |
3.5~8 |
3.5~8 |
3.5~8 |
3.5~8 |
3.5~8 |
3.5~8 |
3.5~8 |
6~9 |
6~9 |
6~9 |
| Temperature |
℃ |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
| N2 |
Flow rate |
Pa•m3/s |
14~17 (4.6) |
17~20 (3.8) |
34~40 |
24~27 (4.7) |
24~27 (4.7) |
54~57 |
54~57 |
54~57 |
54~45 |
17~20 (3.8) |
7.5~10.5 |
8.5~11 |
8.5~11 |
Power Supply
Phase/Volt/Freq. |
200V Models |
|
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
| 400V Models |
|
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
- |
| 460V Models |
|
|
|
|
|
|
|
|
|
|
|
3-phase/440V/50Hz
3-phase/440-480V/60Hz |
3-phase/440V/50Hz
3-phase/440-480V/60Hz |
3-phase/440V/50Hz
3-phase/440-480V/60Hz |
| Power capacity |
kVA |
6.4 |
6.4 |
12.8 |
10.3 |
10.3 |
12.6 |
12.6 |
12.6 |
12.6 |
12.0 |
23.7 |
41.3 |
46.5 |
| Weight |
kg |
240 |
240 |
480 |
380 |
380 |
400 |
400 |
400 |
400 |
410 |
700 |
750 |
1200 |
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