Dry vacuum pump with low power consumption, suitable for corrosive process applications
- Low power consumption
- Corrosion resistant material options
- Identical pumping performance regardless of frequency (50/60 Hz)
- Oil-free
- CE marking/SEMI-S2/NRTL available
Features and Benefits
With EBARA’s unique rotor design and idling function, the Model ESR range achieves low power consumption and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.
Specifications
| Model |
Unit |
ESR20N |
ESR30 |
ESR30N |
ESR500W(N) |
| Pumping Speed |
L/min |
1,300 ~ 2,000 |
3,000 |
3,000 |
46,000 |
| Ultimate Pressure |
Pa |
2.0 |
0.53 |
0.67 |
0.2 |
| Connection |
Inlet |
|
NW40 |
NW50 |
NW50 |
ISO160 |
| Outlet |
|
NW40 |
NW40 |
NW40 |
NW40 |
| Approx. Power at Ultimate Pressure |
kW |
0.7 |
1.7 |
1.7 |
3.1 |
| Cooling water |
Flow rate |
L/min |
2~8 |
3.5~8 |
3.5~8 |
3.5~8 |
| Temperature |
℃ |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
| N2 |
Flow rate |
Pa•m3/s |
19~22 (0) |
19~22 (3.4) |
19~22 (3.4) |
19~22 (3.4) |
Power Supply
Phase/Volt/Freq. |
200V Models |
|
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
3-phase/200V/50Hz
3-phase/200-220V/60Hz |
| 400V Models |
|
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz |
| Power capacity |
kVA |
4.0 |
7.0 |
7.0 |
12.3 |
| Weight |
kg |
90 |
190 |
190 |
500 |
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