Name: Model EV-M
Availability: InStock

Model EV-M

Category: Dry Vacuum Pumps

Quantity:

EBARA Dry Vacuum Pump

Vacuum Turbomolecular Pumps

Low Power Dry Vacuum Pump

Dry vacuum pump with low power consumption, ideal for performance for high-load applications

High-load applications
High-temperature operation control
Low power consumption
Corrosion resistant materials employed as standard
Enhanced corrosion resistant options
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available

Features and Benefits

With EBARA’s unique heat-resistance technology, the Model EV-M range is designed for high-load applications where large volumes of reaction byproducts are generated in semiconductor, liquid crystal, and solar cell manufacturing processes. With its outstanding power consumption performance, the Model EV-M range has mastered the balance between resistance to high-load applications and energy efficiency. Robust anti-corrosion materials are employed as standard. A large-capacity model offering a pumping rate of 110,000 L/min is also available. The extensive product line-up caters to a wide range of high-load applications to match process conditions.

Specifications

Model		Unit	EV-M20N	EV-M102N	EV-M202N	EV-M302N	EV-M502N	EV-M505SF	EV-M802N	EV-M805SF	EV-M1205SF
Pumping Speed		L/min	1,800	10,000	20,000	30,000	50,000	50,000	80,000	80,000	110,000
Ultimate Pressure		Pa	5.0	0.5	0.5	0.5	0.5	0.5	0.5	0.5	0.5
Connection	Inlet		NW40	ISO100	ISO100	ISO100	ISO160	ISO160	ISO200	ISO200	ISO200
Connection	Outlet		NW40	NW40	NW40	NW40	NW40	NW40	NW40	NW40	NW40
Approx. Power at Ultimate Pressure		kW	1.2	1.8	1.9	2.3	2.1	3.9	2.8	4.6	5.3
Cooling water	Flow rate	L/min	3~8	3~8	3.5~8	4~8	5~8	5~8	5~8	5~8	5~8
Cooling water	Temperature	℃	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30
N2	Flow rate	Pa•m3/s	26~31	26~31	26~31	26~31	28~33	228	28~33	228	34~35
Power Supply Phase/Volt/Freq.	200V Models		3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz	3-phase/200V/50Hz 3-phase/200-220V/60Hz
Power Supply Phase/Volt/Freq.	400V Models		3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	-	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz	3-phase/380-400V/50Hz 3-phase/380-440V/60Hz
Power capacity		kVA	3.3	5.4	6.0	6.8	7.1	15.7	8.3	19.4	14.2
Weight		kg	170	320	360	400	500	580	740	820	870