Dry vacuum pump with low power consumption and small footprint
- Low power consumption
- Compact and light weight
- Corrosion resistant material options
- N2 purge model option available
- Identical pumping performance regardless of frequency (50/60 Hz)
- Oil-free
- CE marking/SEMI-S2/NRTL available
Features and Benefits
With EBARA’s unique rotor design and idling function, the Model EV-S range achieves world-class energy efficiency and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.
Specifications
| Model |
Unit |
EV-S20 |
EV-S20P/N |
EV-S30 |
EV-S30P |
EV-S50 |
EV-S50P/N |
EV-S100 |
EV-S100P/N |
EV-S200 |
EV-S200P/N |
| Pumping Speed |
L/min |
1,670 |
1,670 |
3,300 |
3,300 |
5,000 |
5,000 |
10,000 |
10,000 |
20,000 |
20,000 |
| Ultimate Pressure |
Pa |
3 |
5 |
0.5 |
1.0 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
| Connection |
Inlet |
|
NW50 |
NW50 |
NW50 |
NW50 |
NW50 |
NW50 |
NW80 |
NW80 |
NW100 |
NW100 |
| Outlet |
|
NW25 |
NW25 |
NW25 |
NW25 |
NW25 |
NW25 |
NW25 |
NW25 |
NW40 |
NW40 |
| Approx. Power at Ultimate Pressure |
kW |
0.4 |
0.4 |
0.4 |
0.4 |
0.55 |
0.55 |
0.65 |
0.65 |
0.75 |
0.75 |
| Cooling water |
Flow rate |
L/min |
1.5~3.0 |
1.5~3.0 |
1.5~3.0 |
1.5~3.0 |
2.0~3.0 |
2.0~3.0 |
2.0~3.0 |
2.0~3.0 |
2.0~3.0 |
2.0~3.0 |
| Temperature |
℃ |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
Max. 30 |
| N2 |
Flow rate |
Pa•m3/s |
- |
17～20 (2.4) |
- |
17～20 (2.4) |
|
17～20 (2.4) |
|
17～20 (2.4) |
|
17～20 (2.4) |
Power Supply
Phase/Volt/Freq. |
200V Models |
|
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
3-phase/200-220V,50/60Hz |
| 400V Models |
|
3-phase/380-440V,50/60Hz |
3-phase/380-440V,50/60Hz |
- |
- |
3-phase/380-440V,50/60Hz |
3-phase/380-440V,50/60Hz |
3-phase/380-440V,50/60Hz |
3-phase/380-440V,50/60Hz |
3-phase/380-440V,50/60Hz |
3-phase/380-440V,50/60Hz |
| Power capacity |
kVA |
3.2 |
3.2 |
3.6 |
3.6 |
4.8 |
4.8 |
6.4 |
6.4 |
6.8 |
6.8 |
| Weight |
kg |
60 |
60 |
90 |
90 |
100 |
100 |
120 |
120 |
170 |
170 |
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