EBARA Semiconductor Manufacturing Equipment, EBARA Catalysis-Type Exhaust Abatement System
Highly efficient, energy-saving catalysis-type exhaust abatement system
- Catalysis-type exhaust abatement system
- Low power consumption
- Highly efficient abatement of PFC gases
- No fuel required
- Low maintenance costs
Features and Benefits
Model GCR is a catalysis-type exhaust abatement system that
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