EBARA Dry Vacuum Pump, Vacuum Turbomolecular Pumps

Dry vacuum pump with low power consumption, ideal for performance for high-load applications

• High-load applications
• High-temperature operation control
• Low power consumption
• Corrosion resistant materials employed as standard
• Enhanced corrosion resistant options
• Identical pumping performance regardless of frequency

Small, energy-saving, and capable of covering a wide range of processes by one unit

• Suitable for mediumduty processes
• Suitable for high-temperature control
• Energy saving
• Reduced footprint
• Corrosion-resistant materials
• Option for increased corrosion resistance
• Same performance with different frequencies (50

Dry vacuum pump with low power consumption and small footprint

• Low power consumption
• Compact and light weight
• Corrosion resistant material options
• N2 purge model option available
• Identical pumping performance regardless of frequency (50/60 Hz)
• Oil-free
• CE marking/SEMI-S2/NRTL available

Air-cooled dry vacuum pump with low power consumption. Light-weight and compact model.

• Magnetic Levitated Type / Ball Bearing Type